2 edition of Efficient energetic neutral beam source using jet surface conversion found in the catalog.
Efficient energetic neutral beam source using jet surface conversion
Oscar A Anderson
by University of California, Lawrence Livermore Laboratory, Technical Information Dept., for sale by the National Technical Information Service in Livermore, Calif, Springfield, Va
Written in English
|Statement||by Oscar A. Anderson, Lawrence Livermore Laboratory, University of California|
|Series||UCID ; 17659|
|Contributions||United States. Dept. of Energy, Lawrence Livermore Laboratory|
|The Physical Object|
|Pagination||15,  leaves :|
|Number of Pages||15|
This parameter raises or diminishes surface friction in a generic way. It is here so as to be able to do quick calibrations of friction. Start with having this to and after tuning the rest of the surface variables, come back and play with this. defaultDepth: N/A: This parameter sets the depth of the surface fluid in meters. fluidDensity: N/A. where T is the brightness temperature, [inline]\lambda[/inline] the wavelength, k the Boltzmann constant, [inline]\Omega[/inline] the beam solid angle, and S the flux density, all in mks units. Interferometric maps are measured in brightness units [inline]I[/inline] of Jy/beam, where “beam” is a nominal area over which the brightness is.
The topics covered in this book should provide the reader with the fundamentals to understand and improve process applications using broad-beam ion sources. This book covers three broad categories of topics: The ﬁ rst category is the generation and propagation of broad ion beams. TheFile Size: KB. EXTERNAL PHOTON BEAMS: PHYSICAL ASPECTS Air kerma in air For a monoenergetic photon beam in air the air kerma in air (K air) air at a given point away from the source is proportional to the energy fluence Y or photon fluence f as follows: () where (m tr /r) air is the mass–energy transfer coefficient for air at photon energy Size: KB.
Percentage depth dose. Figure Figure1a 1a – d shows a series of PDD curves obtained using the × cm 2 and × 15 cm 2 cut-outs for electron beam energies of 6 and 20 MeV. The shapes of the PDD curves are characteristic of clinical electron beams. Each PDD displays a high surface dose, a buildup region, a broad dose maximum, a sharp dose fall-off, and a bremsstrahlung tail. Conversely, the neutral-beam source completely eliminated the charge build-up and UV/VUV photon irradiation by inserting carbon apertures between the plasma generation region and the substrate surface. In future nanoscale devices, both methods will be very promising candidates for damage-free etching by:
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A method is described for producing an energetic neutral beam of deuterium with high power efficiency. A jet of D(0) particles is incident on a cesium-doped cathode that converts the D(0) to D(-). A grid system adjacent to the cathode accelerates the D(-) ions to keV or more at a current density around A/sq cm, and a charge stripping cell reconverts the accelerated particles to D(0).
Get this from a library. Efficient energetic neutral beam source using jet surface conversion. [Oscar A Anderson; United States.
Department of Energy.; Lawrence Livermore Laboratory.]. Neutralization process efficiency in a low-angle forward-reflected neutral beam source has been observed. Its charging properties have also been compared against those of a conventional plasma processing tool.
Neutralization efficiency, defined as the ratio of the neutral beam flux to the extracted ion beam flux was found to be %.Author: Sung-Wook Hwang, Do-Haing Lee, Chul Ho Shin, Ken Tokashiki, Gyeong-Jin Min, Chang Jin Kang, Han Ku C.
The aim of this research is to explore ways in which energetic neutral beams can be generated and characterized for modifying polymer substrates in a charge-less etching environment, without profile distortion.
A modified inductively coupled plasma source was constructed to characterize processing plasmas and generate a source of energetic neutral particles based upon the resonant gas phase Author: Adetokunbo Ayilaran.
neutral beam has advantages in that the neutral beam energy can be varied through the acceleration and deceleration of the ion beam using the grid system even though the ﬂux of the neutral beam can be slightly lower than the neutral beam ﬂux obtained by other surface neutralization techniques due to.
Si etching using a neutral beam source, the neutral ﬂux from the neutral beam source should be larger than that from the background gases. We performed the neutral beam simu-lation to investigate the relation between the generated neutral beam and the background gases as a function of gas pressure.
situation occurs in magnetic pinches4 and in neutral beam injection schemes. We describe here a steady state, dc discharge, electro statically focused ion beam source with multipole confine ment. This source produces a low density, n&""-'10s cm~3, low divergence, 6"".
Electron beam surface texturing and sculpting, Surfi-Sculpt®. An innovative technology which moves material to build protrusions and cavities; nothing is. The configuration assumed by the deformed neutral surface is known as the elastic curve of the beam.
Slope of a Beam: Slope of a beam is the angle between deflected beam to the actual beam at the same point. Deflection of Beam: Deflection is defined as the vertical displacement of a point on a loaded beam.
There are many methods to find out the. Download3 Stock∞ File Size KB Create Date25th August Download Development and evaluation of highly efficient neutral beam source.
Mass spectrometers for. Guide on the use of low energy electron beams for microbiological decontamination of surfaces Scope This Guide describes the validation and routine monitoring of microbiological decontamination of surfaces by low energy electron beams ( keV).
The Guide is mainly based on experienceFile Size: 1MB. Surface modification is the alteration of the surface composition or structure using energy or particle beams. This article discusses two different surface modification methods. The first, ion implantation, is the introduction of ionized species into the substrate using kilovolt to megavolt ion accelerating potentials.
Energy beam surface treatment of Al alloys has been widely studied. The combination of a primary treatment of surface alloying with Si or Ni, followed by PVD ion plating has been studied on Al-Si alloys (Bell et al., ).An electron beam with a maximum power. source and the neutral beam and controlling the neutral beam energy and angle.
Various neutral beam sources have been studied for neutral beam etching. We have studied neutral beam generation using an ion gun and low-angle reﬂectors,11 A schematic of our two-grid neutral beam source is shown in Fig.
Plasma is created by. CHAPTER 8 Inverse square law (virtual source position) In contrast to a photon beam, which has a distinct focus located at the accelerator X ray target, an File Size: KB. A novel design for a high intensity micron-scale supersonic free-jet source is described. This design has been implemented in a scanning helium neutral atom microscope at Portland State University, but has not been otherwise investigated.
It is proposed that removing the skimmer component of a free-jet source can, under correct operating conditions, allow a comparable intensity beam to be Author: Galen Rhodes Gledhill. This paper reviews results obtained by the research groups developing the low-energy high-current pulsed electron beam (LEHCPEB) in Dalian (China) and Metz (France) on the surface treatment of light alloys.
The pulsed electron irradiation induces an ultra-fast thermal cycle at the surface combined with the formation of thermal stress and shock by: In its directed energy plan, SDIO planned to build a space-based neutral particle beam (NPB) and test it on the ground by the end of fiscal year at an estimated cost of $ million.
What is the neutral surface of a bent beam. In mechanics, the neutral plane or neutral surface is a conceptual plane within a beam or cantilever. When loaded by a bending force, the beam bends so that the inner surface is in compression and the outer surface is in tension. See Full Answer.4/5(2).
gas [5, 6]. Even with this power deficit, a new record neutral beam power (MW) was injected into JET plasma in January At present, the JET NB System is capable of delivering maximum deuterium neutral beam power of >24MW with reliable high power operation achievable at the MW level.
The maximum neutral beam pulse duration for high. Negative Ion Beam Emittance Calculations M. Turek and P. Wgierek-Characterisation of negative ion beam focusing based on phase space structure Yasuaki Haba et al-Response of beam focusing to plasma fluctuation in a filament-arc-type negative ion source Y.
Haba et al-This content was downloaded from IP address on 17/04/ at Cited by: Measurement of Deposit Surface Based On Electron Beam Speckle Position—Single Point. A schematic diagram of the online measurement method for the deposit surfaces in EBF3 is shown in Figure an electron beam is emitted from the cathode of the electron gun, it is accelerated by the anode to 1/3 to 1/2 of the speed of by: 1.An Observation of Energetic Electron Beams in Low-Pressure Linear Discharges Article (PDF Available) in IEEE Transactions on Plasma Science 15(4) - September with 43 Reads.